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Facts

The AME P5000 is a multi-chamber tool set up for a variety of processes

  • Chamber A - PECVD of TEOS Silicon Dioxide
  • TEOS is heated and brought into the chamber where it is subjected to an RF plasma and a heated chamber at 390C

Personnel

Manuals & Users

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2 Comments

  1. 1/27/14 - Tool is down for a faulty MFC. Sending it out for repair.

  2. 2/6/14 - MFC has been replaced. Chamber A is now up.