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Facts

  • The ASM LPCVD is a two tube systems capable of depositing polysilicon, silicon nitride and LTO.
    • It is configured for both 4 inch and 6 inch wafers.
    • It uses dedicated quartz boats.
  • Tube 2 - LPCVD of Silicon Nitride / Polysilicon
    • Dichlorosilane and Ammonia are brought into a heated furnace tube at low pressures to react and grow a silicon nitride film
    • Silane is brought into a heated furnace tube at low pressures to react and grow a poly silicon

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