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Home
Tool Set
Thermal & Implant
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Blue M Ovens
Created by
Thomas Grimsley
, last modified on
Dec 19, 2017
Facts
The Blue M Ovens are for baking substrates.
Used for soft & hard bake of photoresists.
Used for post coat baking of spin on dopants and spin on glass.
Personnel
Tool Engineer -
Process Engineer -
Sean O'Brien
Tool & Process Information
Manuals & Users
Blue M Oven Manual
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Overview
Content Tools
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