Tube 4 is used for the dry oxidation of silicon dioxide.

  • Wafers are loaded into quartz boats - current sizes include 75mm, 100mm & 150mm.
  • Clean wafers only - no wafers with previous metal, CMP, KOH processing
  • Wafers should receive a MOS RCA clean prior to processing in this tube

Other Tubes


Tool & Process Information

Manuals & Users

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