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Tube 5 is used for the wet oxidation of silicon dioxide.

  • It is equipped with an external torch to produce steam oxide at lower temperatures
  • Uses hydrogen gas and oxygen to produce a steam for the faster growth of silicon dioxide.
  • Wafers are loaded into quartz boats - current sizes are 100mm & 150mm.
  • Tube is considered contaminated - not qualified for MOS grade process.
  • Currently reserved for Dr. Hirschman's Research

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