Tube 5 is used for the wet oxidation of silicon dioxide.
- It is equipped with an external torch to produce steam oxide at lower temperatures
- Uses hydrogen gas and oxygen to produce a steam for the faster growth of silicon dioxide.
- Wafers are loaded into quartz boats - current sizes are 100mm & 150mm.
- Tube is considered contaminated - not qualified for MOS grade process.
- Currently reserved for Dr. Hirschman's Research
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