Tube 8 is used for the high temperature annealing of silicon substrates.

  • Tube is considered contaminated - not qualified for MOS grade process.
  • It is equipped with heating elements capable of 1200C and has a silicon carbide tube
  • Currently plumbed with nitrogen. Operated in manual mode.
  • Wafers are loaded into quartz boats - current size is 100mm.

Other Tubes


Tool & Process Information

Manuals & Users

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