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Home
Tool Set
Metrology
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CDE Res Map
Created by
Thomas Grimsley
, last modified on
Feb 01, 2021
Facts
The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films.
The system can do automated resistivity mapping for pieces to 8 inch wafers.
Personnel
Process Engineer -
Sean O'Brien
Super User -
Patricia Meller
Manuals & Users
CDE ResMap Manual - Rev B - 022207
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