RIT will permanently shut down the RIT Wiki (Confluence wiki) on February 2, 2024. Review the Wiki Shut Down Overview for information on alternative tools, exporting content from the wiki, and other FAQs.
Facts
- The CEE Manual Photoresist Spin Coater.
- 3/8" & 3/4" spin chucks for smaller substrates
- It has a nearby softbake hotplate.
- Chemistry
- SU8, Polyimide, and Spin on Glass may be coated in this tool.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Patricia Meller
- Super User - Bryan Melanson
- Any of these personnel can certify new users
Manuals & Users
Overview
Content Tools
Please go to our SMFL Main Website
for information about