CEE 100 Photoresist Spinner

Facts

• The CEE is a Manual Photoresist Spin Coater.
  • Set up for 100mm and 150mm round substrates.
  • It has nearby softbake hotplate.

• Chemistry
  • This manual spinner is used to coat HPR504 Photoresist
  • This manual spinner is used to coat MIR 701 Photoresist
  • SU8, Polyimide, and Spin on Glass may not be coated in this tool.

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Super User - Patricia Meller
• Super User - Bryan Melanson
• Any of these personnel can certify new users

Manuals & Users

• CEE 100 Photoresist Spin Coater Manual - Rev C - 5/12/20
• CEE 100 Photoresist Spin Coater Certification Checklist - 08/19/08