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Facts

  • The CEE is a Manual Photoresist Spin Coater.
    • Set up for 100mm, 150mm round substrates
    • It has nearby softbake hotplate.
    • It has an HMDS vapor prime hotplate
  • Chemistry
    • This manual spinner is used to coat standard positive photoresists such as S1800 and MiR701
    • SU8Polyimide, and Spin on Glass may not be coated in this tool.

Personnel

Manuals & Users

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