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Lithography
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CEE Resist Developer
Created by
Thomas Grimsley
, last modified on
Aug 24, 2023
Facts
The CEE Developer is a Manual Photoresist Developer.
Set up for 100mm, 150mm round substrates
It has nearby softbake hotplate.
Chemistry
This manual developer is set up to dispense CD 26 Developer
Personnel
Tool Engineer -
Rich Battaglia
Process Engineer -
Sean O'Brien
Super User -
Patricia Meller
Any of these personnel can certify new users
Manuals & Users
CEE Manual Developer Manual - Rev C - 5/11/20
CEE Manual Developer Certification Checklist - 8/19/08
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Overview
Content Tools
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