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Home
Tool Set
Lithography
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CEE Resist Developer
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Created by
Thomas Grimsley
, last modified on
Dec 19, 2017
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Facts
The CEE Developer is a Manual Photoresist Developer.
Set up for 100mm, 150mm round substrates
It has nearby softbake hotplate.
Chemistry
This manual developer is set up to dispense
CD 26 Developer
Please read warnings about the dangers of
Tetramethyl Ammonium Hydroxide (TMAH)
which is contained in the developer solution.
Personnel
Tool Engineer -
Rich Battaglia
Process Engineer -
Sean O'Brien
Process Engineer -
Patricia Meller
Manuals & Users
CEE Manual Developer Manual
CEE Manual Developer Certification Checklist
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Overview
Content Tools
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