Facts
- The CEE Developer is a Manual Photoresist Developer.
- Set up for 100mm, 150mm round substrates
- It has nearby softbake hotplate.
- Chemistry
- This manual developer is set up to dispense CD 26 Developer
- Please read warnings about the dangers of Tetramethyl Ammonium Hydroxide (TMAH) which is contained in the developer solution.
Personnel
- Tool Engineer - Peter Yackoff
- Process Engineer - Sean O'Brien
- Process Engineer - Patricia Meller
Manuals & Users
Overview
Content Tools