RIT will permanently shut down the RIT Wiki (Confluence wiki) on February 2, 2024. Review the Wiki Shut Down Overview for information on alternative tools, exporting content from the wiki, and other FAQs.
Facts
- The CHA an electron beam Evaporation Tool.
- Target material is loaded in crucible liners.
- The system is capable of holding eight crucibles for multi-source deposition.
- Dielectrics and metals can be deposited.
- Materials with significant vapor pressures at lower temperatures (Sb, Cd, Zn, etc) are not allowed.
*The system has platens for 100mm and 150mm wafers
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Patricia Meller
- Process Engineer - Sean O'Brien
Tool & Process Information
- Supplier of crucible liners for the SMFL CHA Evaporator
- We use the Thermionics Model #A111460-XX. The XX stands for the material the crucible liner is made from and depends on the material to be evaporated
- Information about E beam evaporation materials & Evaporation in general
Manuals & Users
CHA Evaporator Manual
CHA Evaporator Certification Checklist
Overview
Content Tools
Please go to our SMFL Main Website
for information about