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This process improves the aluminum step coverage in the CVC 601 over the standard cold process.

It is intended for 0.75-1.0 um.

 

Cold/ Hot Sputter ProcessSetpoints
Argon Flow20sccm
Power2000W
Pressure5mT
Process SequenceTime
Pre-sputter (shutter closed)300s
Cold sputter (shutter open)250s

Warm up (set heater timer for 17min)

See instructions in CVC 601 Manual

15min

Hot sputter (approximately 200°C)

1200s
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