This process improves the aluminum step coverage in the CVC 601 over the standard cold process.
It is intended for 0.75-1.0 um.
|Cold/ Hot Sputter Process||Setpoints|
|Pre-sputter (shutter closed)||300s|
|Cold sputter (shutter open)||250s|
Warm up (set heater timer for 17min)
See instructions in CVC 601 Manual
Hot sputter (approximately 200°C)