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Optical
- Optical linewidth measurement
- Optical microscope with image capture
- Optical microscope with Nomarski Imaging
Nanometrics Spectrophotometers
- Measurement of oxide, nitride
Rudolph AutoEL IV Ellipsometer
- Ellipsometry of thin films
- Ellipsometry using variable angle, multi spectral
- Dynamic measurement of step heights using interferometry
Contact
- Measurement of film resistivity
- Profilometer measurement of film steps
Overview
Content Tools
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