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Optical

Leitz Inspection Station

  • Optical linewidth measurement

Leica Inspection Station

  • Optical microscope with image capture

Olympus Microscope

  • Optical microscope with Nomarski Imaging

Nanometrics Spectrophotometers

  • Measurement of oxide, nitride

Prometrix SpectraMap Spectroscopic

  • Measurement of oxide, nitride

Rudolph AutoEL IV Ellipsometer

  • Ellipsometry of thin films

Woollam VASE Ellipsometer

  • Ellipsometry using variable angle, multi spectral

Wyko Dynamic Optical Profiler

  • Dynamic measurement of step heights using interferometry

Contact

CDE Res Map

  • Measurement of film resistivity

Tencor P2

  • Profilometer measurement of film steps

Electron

Amray 1830 SEM

  • Scanning electron measurement
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