Skip to end of metadata
Go to start of metadata

Facts

  • The Nanomaster NSC 2000 Sputter Coater is a sputter down system that uses 2 inch targets. It can accommodate 6 inch wafers as well as wafer pieces and has a rotating platen. Best uniformity is obtained by centering substrates on the platen.
  • The Nanomaster is currently set up for zinc deposition. Because of the nature of zinc, re-depositon of zinc will occur on any substrate that is placed in this chamber.

Personnel

Tool & Process Information

Manuals & Users

  • No labels