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Targets

Current PVD Targets & Change Schedule

Sputter Tools

CVC 601 Sputter

  • DC Targets

PE2400A Sputter

  • RF Targets

PE4400 Sputter

  • RF Targets, Loadlocked

Nanomaster NSC 2000

  • 2 Inch DC Targets

Denton SEM Coater

  • DC gold foil sputter

Anatech SEM Coater

  • DC carbon sputter

Evaporation Tools

CHA Electron Beam Evaporator

  • Eight pocket system

CHA Flash Evaporator

  • Al flash evaporator

CVC Thermal Evaporator

  • General thermal evaporator

Other Information

PVD Process Information

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