RIT will permanently shut down the RIT Wiki (Confluence wiki) on February 2, 2024. Review the Wiki Shut Down Overview for information on alternative tools, exporting content from the wiki, and other FAQs.
Facts
- The system is currently plumbed with Cl2 and BCl3
- Used for etching II-V materials
Personnel
- Tool Engineer - John Nash
- Any of these personnel can certify new users
Tool & Process Information
Manuals & Users
Overview
Content Tools
Please go to our SMFL Main Website
for information about