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SA-CMOS Process

  • RIT 2 µm Twin-well CMOS process
  • LOCOS isolation
  • Common boron VT adjust implant
  • N+ poly gate, 300 Å gate oxide
  • 2-level Aluminum metallization

Performance Parameters

  • VTn = 1 V, VTp = -1 V
  • Leff ~ 1.5 µm
  • RDSn = 1.5 kO-µm, RDSp = 3 kW-µm
  • SSn ~ 105 mV/dec, SSp ~ 90 mV/dec
  • Rsn = 24 O/?sq , Rsp = 60 O/?sq
  • Poly Rs = 35/80 O/?sq (nmos/pmos)

Design & Layout Specifications

  • Conservative MOSIS design rules, l = 2 µm
  • Poly shrink will reduce gate length to 2 µm
  • Contacts & vias will remain 4 µm x 4 µm
  • 1X contact print or 5X reduction lithography
  • Preferred file format: gdsii

Process Options

  • Custom threshold adjustments, multiple VTs
  • 1.5 µm gate length option, Leff ~ 1 µm
  • Dual workfunction
  • Custom metallization
  • 1X & 5X lithography mix & match
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