Skip to end of metadata
Go to start of metadata

SMFL SDS Listing - Standard Chemistry

Below is a listing of standard chemistry found in the cleanroom.

Chemistry is listed by grouping.

If you don't know the type - do a search on this page - by pushing Control F

Chemicals in Bold are supplied by the SMFL - others are the property of various researchers.

To import a new chemical into the cleanroom,  you can find the SMFL Imported Chemical Form here


Acids

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Acetic Acid

Sigma Aldrich

4/26/12

SDS

Ammonium FluorideAnachemica2/27/16SDS
Citric AcidAlfa Aesar9/3/13SDS

Hydrofluoric Acid

Avantor

6/18/14

SDS

Hydrochloric Acid

Avantor

2/2/15

SDS

Iodic AcidBeantown Chemicals6/22/15SDS

Phosphoric Acid

Avantor

6/24/15

SDS

Nitric Acid

Avantor

6/4/14

SDS

Sulfuric Acid

Avantor

2/2/15

SDS

Bases

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Ammonium Hydroxide

Avantor

3/4/15

SDS

Potassium Hydroxide

Avantor

6/5/14

SDS

Sodium Hydroxide

Ricca

5/4/15

SDS

Specialty Etchants

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Aluminum Etch 16-1-1-2

Fuji Film

12/6/18

SDS

Aluminum Etch Type D

Transene

7/1/13

SDS

Buffered Oxide Etch 10:1 (BOE)

Avantor

11/13/14

SDS

Buffered Oxide Etch 10:1 (BOE) w/ Surfactant

Fuji Film

8/5/14

SDS

Chrome Etch 9048S

Transene

5/1/19

SDS

Ferric Chloride

MG Chemicals

8/16/13

SDS

Freckle Etch

Fuji Film

9/25/17

SDS

Gold Etch TFA

Transene

4/1/13

SDS

Pad Etch

Fuji Film

10/4/18

SDS

Nichrome etchantTransene5/1/19SDS

Photoresists / Lithographic Chemicals

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Aquatar CoatingAZ/Merck7/31/18SDS
AZ 1505 PhotoresistAZ/Merck6/5/15SDS
AZ 1512 PhotoresistAZ/Merck10/24/19SDS
AZ 1518 PhotoresistAZ/Merck10/22/18SDS
AZ 5214 PhotoresistClariant4/17/15SDS

AZ 9260 Photoresist

AZ/Merck8/19/19

SDS

AZ-P4110 PhotoresistAZ4/3/15SDS
AZ P4620 PhotoresistAZ8/13/15SDS
BARLI-II 90AZ/Merck7/11/17SDS
CT-2000Fuji

HexamethyldisilazaneAvantor

6/8/14

SDS

HPR 504 ResistFujiFilm2/11/15SDS
IM HM 140 ResistIrresistible Materials2/24/15SDS

LOR A Resists

Kayaku

8/22/19

SDS

LOR B Resists

Kayaku

8/22/19

SDS

MiR 701 PhotoresistAZ/Merck5/2/19SDS
nLOF 2020 PhotoresistAZ/Merck4/17/15

SDS

mr-DWL 5 PhotoresistMicroresist Technology2/12/16SDS
mr-DWL 40 PhotoresistMicroresist Technology2/12/16SDS
NR1-6000PY PhotoresistFuturrex4/30/15SDS

NR7-1000PY Photoresist

Futurrex4/30/15

SDS

NR74G-1000P Photoresist

Futurrex1/21/16

SDS

NR9-1000 Photoresist




NR9-8000 Photoresist

Futurrex5/1/15SDS
NR9g-1000PY PhotoresistFuturrex5/1/15SDS
NR9g-1500PY PhotoresistFuturrex1/13/16SDS
NR95g-6000PY Photoresist


P4400 PhotoresistAZ/Merck12/31/14SDS
PR1-1000A1 PhotoresistFuturrex1/21/19SDS

ProTEK B3 25

Brewer7/13/15SDS
ProTEK B3 PrimerBrewer4/21/15SDS

S1805 Photoresist

Dow/ Rohm& Haas

7/22/15

SDS

S1813 Photoresist

Dow/ Rohm& Haas

7/22/15

SDS

S1827 Photoresist

Dow/ Rohm& Haas

2/25/15

SDS

SB-4000Fuji

SG-4000Fuji

SG-4000Fuji

SU-8 2000 Series Photoresist

Kayaku/MicroChem

9/11/19

SDS

SU-8 3000 Series Photoresist

Kayaku/MicroChem

9/18/19

SDS

TSMR-iN008 PM Photoresist

TOK1/1/06

MSDS

Spin on Glass

Chemical/Trade Name

Manufacturer

Rev

SDS Link

512B - Spin on Glass

Honeywell8/25/15SDS

Accuglass P112 SOG

Honeywell11/19/14

SDS

B1500Desert Silicon4/6/16SDS

B150X - Boron Spin on Dopant

Honeywell1/5/15SDS

B75X - Boron Spin on Dopant

Honeywell1/5/15SDS
BDC1 - Boron Dopant CoatingFuturrex1/31/18SDS
IC1-200 - Dielectric CoatingFuturrex1/31/18SDS
P8545SF Phosphorous Spin on DopantFilmtronics3/26/18SDS
Intervia Photodielectric 8023-10Rohm & Haas8/29/19SDS
PDC5 - Phosphorous Dopant CoatingFuturrex1/31/18SDS
PhosphorofilmEmulsitone5/1/15SDS

ZPDC2-2000




ZN245Desert Silicon3/28/18SDS

Developers - Alkaline & Solvent

Chemical/Trade Name

Manufacturer

Rev

SDS Link

AZ 300 MIF DeveloperClariant9/19/12SDS
AZ 400 K 4:1 DeveloperAZ5/2/18SDS

CD-26 Developer

Dow/ Rohm& Haas

9/1/20

SDS

MF 321 DeveloperDow / Rohm & Haas4/26/15SDS

Microposit 351 Developer

Dow/ Rohm& Haas

3/11/15

SDS

RD6 Developer

Futurrex1/21/19

SDS

SU8 Developer

MicroChem

9/18/19

SDS

Solvents/Strippers

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Acetone

Avantor

6/17/14

SDS

BTS-220 - PGMEAJT Baker9/17/14SDS

Chloroform

JT Baker

6/12/14

SDS

Edge Bead Remover EBR2

Futurrex4/30/15

SDS

Ethanol

Pharmco

5/8/14

SDS

Isopropanol

Avantor

6/23/14

SDS

Methanol

Avantor

4/2/15

SDS

Nano Remover PG

Microchem

12/16/14

SDS

NMPBDH - VWR3/23/15SDS

PRS2000

Avantor

6/8/14

SDS

PSE-200

Transene4/1/16

SDS

PSE-300S/F

Transene7/1/13

SDS

RER 600 - Edge Bead RemoverFuji Film2/4/19SDS

Remover RR41

Futurrex1/21/19

SDS

Remover RR5

Futurrex1/29/14

SDS

Styrene

TCI America8/18/15SDS

SU8 Thinner

MicroChem

7/2/13

SDS

XyleneMillipore10/30/14SDS

Etch Gases

Chemical/Trade Name

Manufacturer

Rev

SDS Link

ArgonMatheson/Air Gas12/10/15SDS

Boron Trichloride

Matheson/Air Products

9/6/15

SDS

Chlorine

Air Products

7/28/15

SDS

Difluoromethane R32 (CH2F2)Airgas8/15/15SDS
Hexafluoroethane R116 (C2F6)Airgas4/16/13SDS
HeliumAirgas5/1/15SDS
NitrogenAirgas8/7/15SDS
Octafluorocyclobutane (C4F8)Airgas1/26/15SDS
Octafluoropropane (C3F8Matheson6/13/12SDS
OxygenMatheson12/10/2015SDS

Sulfur Hexafluoride

Air Products

9/6/15

SDS

Tetrafluoromethane (CF4)

Airgas

5/17/2015

SDS

Trifluoromethane (CHF3)

Airgas

10/20/14

SDS

Xenon Difluoride

Air Products

1/21/15

SDS

Deposition / Implant Gases

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Ammonia

Air Products

9/6/15

SDS

Boron Trifluoride

Air Liquide/Voltaix

9/22/15

SDS

Dichlorosilane

Air Products

9/6/15

SDS

Helium / OxygenAirgas10/15/14SDS
HydrogenMatheson3/14/14SDS
Nitrous OxideAirgas5/20/15SDS 

Phosphine

Air Liquide/Voltaix

11/6/15

SDS

Silane

Air Products

9/6/15

SDS

ALD Gases

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Trimethylaluminum

Strem4/25/14

SDS

Diethylzinc

Strem

4/25/14

SDS

Tetrakis TitaniumStrem8/1/16SDS 


MOCVD Gases

Chemical/Trade Name

Manufacturer

Rev

SDS Link

ArsineMatheson12/4/14SDS
DisilaneMatheson3/14/14SDS
Forming Gas (5% H2 in N2)Matheson10/26/15SDS
HydrogenMatheson3/14/14SDS
PhosphineMatheson12/10/12SDS
Trimethylgallium (TMGa)Dow/SAFC Hitec4/20/15SDS
Triethylgallium (TEGa)Dow/SAFC Hitec8/1/14SDS
Trimethylindium (TMIn)Dow/SAFC Hitec12/11/15SDS
Trimethylaluminum (TMAl)Dow/SAFC Hitec3/16/15SDS

Tritertiarybutylaluminum (TTBAl) 

Dow/SAFC Hitec5/26/16SDS
TriethylantimonyDockweiler Chemicals1/20/16SDS
TrimethylantimonyDow/SAFC Hitec4/21/14SDS
TertiarybutylarsineDockweiler Chemicals6/5/15SDS
CarbontetrachlorideDow/SAFC Hitec4/9/15SDS
DiethyltellurideDow/SAFC Hitec8/14/14SDS




Other

Chemical/Trade Name

Manufacturer

Rev

SDS Link

Ammonium SulfideAlfa Aesar10/9/12SDS
Bismuth(III) nitrate pentahydrateBeantown Chemical11/24/14SDS

Glycerol

Avantor

4/24/14

SDS

Hydrogen Peroxide

Avantor

6/11/14

SDS

Silver NitrateCascade Silver Company1/1/15SDS

Sodum Dodecyl Sulfate

Affymetrix4/21/15SDS
Sylgard 184 SilconeDow Corning2/17/15SDS
Sylgard 184 Silcone Curing AgentDow Corning3/19/16SDS

Teflon AF

DuPont5/27/15

SDS

Tetraethyl Orthosilicate (TEOS)

Fuji5/27/17SDS

Trans LC

Schumacher

9/6/15

SDS

Metals / Deposition Materials

Aluminum

Lesker 

SDS

Aluminum Oxide

Lesker

 

SDS

Chromium

Lesker 

SDS

Copper

Lesker 

SDS

Gallium Oxide

Sigma Alrich6/25/14

SDS

Gold

Lesker 

SDS

HafniumLesker SDS 

Hafnium Oxide

Lesker 

SDS

IndiumLesker SDS 

Indium Oxide

Lesker 

SDS

Indium Tin Oxide

Lesker 

SDS

MolybdenumLesker SDS 

Nickel

Lesker 

SDS

Palladium

Lesker 

SDS

Platinum

Lesker 

SDS

SiliconLesker SDS

Silicon Dioxide

Lesker 

SDS

Silicon Nitride

Lesker 

SDS

Tantalum

Lesker 

SDS

Titanium

Lesker 

SDS

Tungsten

Lesker 

SDS

Zinc Oxide

Lesker 

SDS

SMFL Lab Support Materials

Chemical/Trade Name

Manufacturer

Rev

SDS Link

DPD Free Chlorine Reagent

 

3/4/14

SDS

Ethylene Glycol

Sigma Aldrich

2/26/15

SDS

Fomblin 16/6 Vacuum Oil

Inland

9/19/14

SDS

Fomblin 25/6 Vacuum Oil

Inland

9/19/14

SDS

Leybonol LVO 400 Vacuum OilOerlikon Leybold5/10/09SDS

Inland 45 Oil

Inland

1/1/15

SDS

Inland FF10 Flushing Fluid

Inland

6/1/15

SDS

Inland TP 500 Oil

Inland

1/1/10

MSDS

Inland TW Oil

Inland

6/1/15

SDS

Invoil 20 Oil

Inland

6/1/15

SDS

Invoil 704 Oil

Inland

7/1/15

SDS

Propylene Glycol

Dow

4/21/15

SDS

Ice BlockHillside Chem3/25/14SDS 
Novaclean - Floor & LabMicronova6/15/15SDS 


Chemical/Trade Name

Manufacturer

Rev

SDS Link

Orthogonal Developer 100

Orthogonal 

MSDS

Orthogonal Developer 103

Orthogonal 

MSDS

Orthogonal Developer 110

Orthogonal 

MSDS

Orthogonal Stripper 310

Orthogonal 

MSDS

Orthogonal Stripper 610

Orthogonal 

MSDS

Orthogonal Stripper 700

Orthogonal 

MSDS

Orthogonal Stripper 900

Orthogonal 

MSDS

OSCoR 1510 Photoresist

Orthogonal 

MSDS

OSCoR 2312 Photoresist

Orthogonal 

MSDS

OSCoR 4000 Photoresist

Orthogonal 

MSDS

OSCoR CP Photoresist

Orthogonal 

MSDS

Orthogonal Solution 900

Orthogonal 

MSDS




  • No labels