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SMFL SDS Listing - Standard Chemistry

Below is a listing of standard chemistry found in the cleanroom.

Chemistry is listed by grouping

If you don't know the type - do a search on this page - by pushing Control F

Acids

Chemical/Trade Name

Main Hazard

Manufacturer

Rev

SDS Link

Acetic Acid

Combustible/Corrosive

Sigma Aldrich

4/26/12

SDS

Hydrofluoric Acid

Toxic/Corrosive

Avantor

6/18/14

SDS

Hydrochloric Acid

Corrosive

Avantor

2/2/15

SDS

Phosphoric Acid

Corrosive

Avantor

6/24/15

SDS

Nitric Acid

Corrosive

Avantor

6/4/14

SDS

Sulfuric Acid

Corrosive

Avantor

2/2/15

SDS

Bases

Chemical/Trade Name

Main Hazard

Manufacturer

Rev

SDS Link

Ammonium Hydroxide

Corrosive

Avantor

3/4/15

SDS

Potassium Hydroxide

Corrosive

Avantor

6/5/14

SDS

Sodium Hydroxide

Corrosive

Ricca

5/4/15

SDS

Specialty Etchants

Chemical/Trade Name

Ingredient of Concern

Main Hazard

Manufacturer

Rev

SDS Link

Aluminum Etch 16-1-1-2

Phosphoric Acid

Toxic

Fuji Film

9/29/14

SDS

Aluminum Etch Type D

Phosphoric Acid

Toxic

Transene

7/1/13

SDS

Buffered Oxide Etch 10:1 (BOE)

Hydrofluoric Acid

Toxic

Avantor

11/13/14

SDS

Buffered Oxide Etch 10:1 (BOE) w/ Surfactant

Hydrofluoric Acid

Toxic

Fuji Film

8/5/14

SDS

Buffered Oxide Etch 5:1 (BOE) w/ SurfactantHydrofluoric Acid

Toxic

Transene

7/1/13

SDS

CR-9S Chrome Etch

Perchloric Acid

Corrosive

Cyantek

9/10/03

MSDS

Ferric Chloride

Hydrochloric Acid

Corrosive

MG Chemicals

8/16/13

SDS

Freckle Etch

Fluoroboric Acid

Toxic

Fuji Film

4/14/14

SDS

Gold Etch TFA

Hydrochloric Acid

Corrosive/Toxic

Transene

4/1/13

SDS

Pad Etch

Ammonium Fluoride

Toxic

Fuji Film

6/30/14

SDS

Photoresists / Lithographic Chemicals

Chemical/Trade Name

Ingredient of Concern

Main Hazard

Manufacturer

Rev

SDS Link

HexamethyldisilazaneHexamethyldisilazaneCombustible - IrritantAvantor

6/8/14

SDS

HPR 504 Photoresist

Ethyl Lactate

Combustible - Irritant

Fuji Film

2/11/15

SDS

LOR A Resists

Cyclopentanone

Combustible - Irritant

MicroChem

10/7/14

SDS

LOR B Resists

Cyclopentanone

Combustible - Irritant

MicroChem

4/19/12

SDS

Microprimer P-20

Hexamethyldisilazane

Combustible - Irritant

Shin Etsu

11/4/13

SDS

MP-90

Hexamethyldisilazane

Combustible - Irritant

Shin Etsu

11/4/15

SDS

nLOF 2020 PhotoresistPGMEA

nLOF 2020 Photoresist

AZ4/17/15

SDS

OiR 620 Photoresist

PGMEA

Combustible - Irritant

Fuji Film

8/25/14

SDS

Microposit S1805 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

7/22/15

SDS

Microposit S1813 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

7/22/15

SDS

Microposit S1827 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

2/25/15

SDS

MicroChem SU-8 2000 Photoresist

Gamma Butyrolactone

Combustible - Irritant

MicroChem

7/16/13

SDS

MicroChem SU-8 3000 Photoresist

Gamma Butyrolactone

Combustible - Irritant

MicroChem

7/16/13

SDS

Developers - Alkaline & Solvent

Chemical/Trade Name

Ingredient of Concern

Main Hazard

Manufacturer

Rev

SDS Link

CD-26 Developer

Tetramethyl Ammonium Hydroxide

Toxic

Dow/ Rohm& Haas

4/6/415

SDS

Microposit 351 Developer

Sodium Hydroxide

Corrosive

Dow/ Rohm& Haas

3/11/15

SDS

SU8 Developer

PGMEA

Combustible - Irritant

MicroChem

2/22/12

SDS

Solvents/Strippers

Chemical/Trade Name

Ingredient of Concern

Main Hazard

Manufacturer

Rev

SDS Link

Acetone

Acetone

Flammable - Irritant

Avantor

6/17/14

SDS

BTS-220PGMEAFlammable - IrritantJT Baker9/17/14SDS

Chloroform

Chloroform

Combustible / Toxic

JT Baker

6/12/14

SDS

Ethanol

Ethanol

Flammable

Pharmco

5/8/14

SDS

Isopropanol

Isopropanol

Flammable - Irritant

Avantor

6/23/14

SDS

Methanol

Methanol

Flammable - Toxic

Avantor

4/2/15

SDS

Nano Remover PG

N-Methyl Pyrrolidinone

Combustible - Irritant

Microchem

12/16/14

SDS

PRS2000

N-Methyl Pyrrolidinone

Combustible - Irritant

Avantor

6/8/14

SDS

SU8 Thinner

Cyclopentanone

Flammable - Irritant

MicroChem

7/2/13

SDS

Etch Gases

Chemical/Trade Name

Main Hazard

Manufacturer

Rev

SDS Link

ArgonAsphyxiantMatheson/Air Gas12/10/15SDS

Boron Trichloride

Toxic/Corrosive

Matheson/Air Products

9/6/15

SDS

Chlorine

Toxic/Corrosive

Air Products

7/28/15

SDS

Difluoromethane R32 (CH2F2)AsphyxiantAirgas8/15/15SDS
Hexafluoroethane R116 (C2F6)AsphyxiantAirgas4/16/13SDS
HeliumAsphyxiantAirgas5/1/15SDS
NitrogenAsphyxiantAirgas8/7/15SDS
OxygenOxidizerMatheson12/10/2015SDS

Sulfur Hexafluoride

Asphyxiant

Air Products

9/6/15

SDS

Tetrafluoromethane (CF4)

Asphyxiant

Airgas

5/17/2015

SDS

Trifluoromethane (CHF3)

Asphyxiant

Airgas

10/20/14

SDS

Xenon Difluoride

Oxidizer

Air Products

1/21/15

SDS

Deposition / Implant Gases

Chemical/Trade Name

Main Hazard

Manufacturer

Rev

SDS Link

Ammonia

Inhalation Hazard

Air Products

9/6/15

SDS

Boron Trifluoride

Corrosive/Toxic

Air Liquide/Voltaix

9/22/15

SDS

Dichlorosilane

Pyrophoric/Toxic

Air Products

9/6/15

SDS

Fluorine (5%) Argon BalanceCorrosive/ToxicAirgas3/14/14SDS
Helium / OxygenAsphyxiantAirgas10/15/14SDS
HydrogenFlammableMatheson3/14/14SDS
MethaneFlammableAirgas12/5/13SDS 
Nitrous OxideOxidizerAirgas5/20/15SDS 
Octafluorocyclobutane (C4F8)AsphyxiantAirgas1/26/15SDS   
Octafluoropropane (C3F8AsphyxiantMatheson6/13/12SDS

Phosphine

Pyrophoric/Toxic

Air Liquide/Voltaix

11/6/15

SDS

Silane

Pyrophoric

Air Products

9/6/15

SDS

ALD Gases

Chemical/Trade Name

Main Hazard

Manufacturer

Rev

SDS Link

Trimethylaluminum

Flammable/Corrosive

Strem4/25/14

SDS

Diethylzinc

Flammable/Corrosive

Strem

4/25/14

SDS

Tetrakis TitaniumFlammable/CorrosiveStrem8/1/16SDS 

Other

Chemical/Trade Name

Main Hazard

Manufacturer

Rev

SDS in System

SDS Link

CA-40 Mask Cleaner

Irritant

Cyantek

11/5/03

x

MSDS

Glycerol

Irritant

Avantor

4/24/14

 

SDS

Hydrogen Peroxide

Oxidizer

Avantor

6/11/14

 

SDS

Parylene

Flammable

SCS

3/27/15

 

SDS

Tetraethyl Orthosilicate (TEOS)

Flammable

Air Products

1/8/16


SDS

Trans LC

Irritant

Schumacher

9/6/15

 

SDS

Metals / Deposition Materials

Chemical/Trade Name

ManufacturerRev

MSDS Link

Aluminum

Lesker 

SDS

Aluminum Oxide

Lesker

 

SDS

Chromium

Lesker 

SDS

Copper

Lesker 

SDS

Gallium Oxide

Sigma Alrich6/25/14

SDS

Gold

Lesker 

SDS

HafniumLesker SDS 

Hafnium Oxide

Lesker 

SDS

IndiumLesker SDS 

Indium Oxide

Lesker 

SDS

Indium Tin Oxide

Lesker 

SDS

MolybdenumLesker SDS 

Nickel

Lesker 

SDS

Palladium

Lesker 

SDS

Platinum

Lesker 

SDS

SiliconLesker SDS

Silicon Dioxide

Lesker 

SDS

Silicon Nitride

Lesker 

SDS

Tantalum

Lesker 

SDS

Titanium

Lesker 

SDS

Tungsten

Lesker 

SDS

Zinc Oxide

Lesker 

SDS

SMFL Materials

Chemical/Trade Name

Used In

Manufacturer

Rev

SDS Link

DPD Free Chlorine Reagent

Water Testing

 

3/4/14

SDS

Ethylene Glycol

Coolant

Sigma Aldrich

2/26/15

SDS

Fomblin 16/6 Vacuum Oil

Vacuum Pumps

Inland

9/19/14

SDS

Fomblin 25/6 Vacuum Oil

Vacuum Pumps

Inland

9/19/14

SDS

Inland 45 Oil

Vacuum Pumps

Inland

1/1/15

SDS

Inland FF10 Flushing Fluid

Vacuum Pumps

Inland

6/1/15

SDS

Inland TP 500 Oil

Vacuum Pumps

Inland

1/1/10

MSDS

Inland TW Oil

Vacuum Pumps

Inland

6/1/15

SDS

Invoil 20 Oil

Vacuum Pumps

Inland

6/1/15

SDS

Invoil 704 Oil

Vacuum Pumps

Inland

7/1/15

SDS

Propylene Glycol

Coolant

Dow

4/21/15

SDS

Ice BlockCoolantHillside Chem3/25/14SDS 
Novaclean - Floor & LabLab CleaningMicronova6/15/15SDS 
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