Skip to end of metadata
Go to start of metadata


  • The SSI is a photoresist coat & develop track.
    • Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
    • It has a coat track with HMDS vapor prime and softbake hotplate.
    • It has a develop track with post develop hardbake hotplate.


Manuals & Users

  • No labels