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  • The SVG 88 #1 is a photoresist coat & develop track.
    • Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
    • It has a coat track with HMDS vapor prime and softbake hotplate.
    • It has a develop track with post develop hardbake hotplate.
    • Manual dispense is allowed on this track.


Tool & Process Information

Manuals & Users

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