Skip to end of metadata
Go to start of metadata
- The SVG 88 #2 is a photoresist coat & develop track.
- Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines.
- It has a post exposure bake hotplate
- It has a coat track with HMDS vapor prime and softbake hotplate.
- Spin chuck has Edge Bead Removal - currently set to dispense RER-600
- It has a develop track with post develop hardbake hotplate.
- Manual dispense is not allowed on this track.
Manuals & Users