Suss MJB4 Aligner

Facts

• The Suss MJB4 Contact Aligner is a 1x aligner.
• The mask is brought into close contact with the substrate.
  • The features on the mask are printed at the intended size for on the substrate - 1x designation.
  • The gap can be made larger for 'sticky' resists - subsequent loss of high frequency information - square corners become rounded.
  • Uses 5" x 5" x 0.09" soda lime photomasks.
• Capable of features down to 2um in size
• It is has chucks for a variety of wafer / substrate sizes and uses the mercury broadband for exposure.

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Super User - Emily Kessler-Lewis

Manuals & Users

• Suss MJB4 Contact Aligner Manual - Rev A - 6/18/21
• Suss MJB4 Contact Aligner Certification Checklist