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Facts
The Tencor profilometer is a long scan profilometer that is capable of measuring step heights, stress, surface roughness by moving a stylus over a defined step in the film to be measured.
- Model P2
- Pieces to 8 inch wafers.
- Total step height 100 Å to 300µm with various resolutions (1A at 10um scale)
- Scan length up to 200 mm.
- Stylus radius is 12 microns
Personnel
- Tool Engineer - John Nash
- Process Engineer - Sean O'Brien
- Process Engineer - Patricia Meller
Manuals & Users
Overview
Content Tools
Please go to our SMFL Main Website
for information about
1 Comment
Bruce Tolleson
01/30/14 - P2 Profilometer is returned, repaired, calibrated tested and reinsatalled. Ready for use.