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Facts

The Tencor profilometer is a long scan profilometer that is capable of measuring step heights, stress, surface roughness by moving a stylus over a defined step in the film to be measured.

  • Model P2
  • Pieces to 8 inch wafers.
  • Total step height 100 Å to 300µm with various resolutions (1A at 10um scale)
  • Scan length up to 200 mm.
  • Stylus radius is 12 microns

Personnel

Manuals & Users

 

 

 

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  1.  

    01/30/14 - P2 Profilometer is returned, repaired, calibrated tested and reinsatalled.  Ready for use.