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  • Tencor Surfscan 364
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The Tencor Surfscan is used for detecting particulates and contamination on highly polished substrates.

  • Model 364
  • It rasters an 632nm laser across the surface and detects the scattered (not reflected) light from the particles on the surface.
  • The cross section of the scattered light correlates to the size of the particle. (Mie Scattering, not Rayleigh Scattering)


Tool & Process Information

Manuals & Users


7/1/13 - This tool is down with multiple issues.  Currently due to the age of this tool, there does not seem to be a path forward to repair.  The SMFL may have had the last working unit of this type known.  Chances are good that this tool will not return to the floor.  We are looking at the possibility of purchasing a replacement depending on the budget for this fiscal year.




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