- The Trion Apollo Asher is a fully automated single wafer processing tool that utilizes downstream plasma to remove photoresist.
- The Asher detects endpoint by monitoring the 430nm optical signal from the plasma.
- Wafers are processed between 200C and 300C.
- The Apollo Asher is only set up to handle 6” wafers. Four inch wafers as well as wafer pieces may be processed using carriers wafers.
- The system is currently plumbed with oxygen .
Manuals & Users