• The Trion Apollo Asher is a fully automated single wafer processing tool that utilizes downstream plasma to remove photoresist. 
  • The Asher detects endpoint by monitoring the 430nm optical signal from the plasma. 
  • Wafers are processed between 200C and 300C. 
  • The Apollo Asher is only set up to handle 6” wafers. Four inch wafers as well as wafer pieces may be processed using carriers wafers.
  • The system is currently plumbed with oxygen .


Tool & Process Information

Manuals & Users

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