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  • Trion Etcher
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Facts

  • The Trion etcher is a reactive ion etcher set up for 100 or 150mm wafers.
  • The Trion is a loadlocked system and is used for the reactive ion etching of silicon dioxide.
  • The system is currently plumbed with Argon, Oxygen, CHF3 and CF4.

Personnel

Tool & Process Information

Manuals & Users

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