RIT will permanently shut down the RIT Wiki (Confluence wiki) on February 2, 2024. Review the Wiki Shut Down Overview for information on alternative tools, exporting content from the wiki, and other FAQs.
Facts
The Varian 350D is a medium current ion implanter set up for boron and phosphorous implants.
- Set up for 100mm and 150mm round substrates
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Process Engineer - Patrica Meller
Manuals & Users
Overview
Content Tools
Please go to our SMFL Main Website
for information about