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  • Wet Bench - BOE and Pad Etch
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Facts

  • 10:1 BOE Tank is for general oxide etching.
  • Pad Etch Tank is for etching oxide when aluminum is exposed. The etch rate of aluminum will be lower in Pad Etch than in regular BOE. It is important to note that the aluminum does still etch in this solution.
  • 5.2:1 BOE Tank is for oxide etching where a much faster rate is desired.
    • A 5:1 mixture will form crystals in the bath at temperatures below 64F

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Tool & Process Information

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