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  • Wet Bench - Manual Process 2
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Facts

This wetbench is set up for general chemical processing and also has a bath used for HCl decontamination

  • Used for general purpose manual chemical processing.
  • Heated Quartz Bath for HCl decontamination of wafers after KOH etch.
  • This bench has a chemical sink with DI spigot.
  • This bench has a Cascade rinse tank.

Personnel

Tool & Process Information

Manuals & Users

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