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Facts
This wetbench is set up for general chemical processing and also has a bath used for HCl decontamination
- Used for general purpose manual chemical processing.
- Heated Quartz Bath for HCl decontamination of wafers after KOH etch.
- This bench has a chemical sink with DI spigot.
- This bench has a Cascade rinse tank.
Personnel
- Tool Engineer -
- Process Engineer - Sean O'Brien
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