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  • Woollam VASE
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Facts

The Woollam Vase is an ellipsometer with variable wavelength and angle of incidence. It is capable of

  • Reflection and Transmission Ellipsometry
  • Generalized Ellipsometry
  • Reflectance (R) intensity
  • Transmittance (T) intensity
  • Cross-polarized R/T
  • Depolarization
  • Scatterometry
  • Mueller-matrix

Its incident wavelength range is 200nm up to 2500nm (with different cable)

Personnel

Tool & Process Information

Manuals & Users

Woollam VASE Manual

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