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Chemical/Trade Name

Ingredient of Concern

Main Hazard

Manufacturer

Rev

SDS Link

HexamethyldisilazaneHexamethyldisilazaneCombustible/Corrosive/ToxicAvantor

6/8/14

SDS

HPR 504 Photoresist

Ethyl Lactate

Combustible - Irritant

Fuji Film

2/11/15

SDS

LOR A Resists

Cyclopentanone

Combustible - Irritant

MicroChem

10/7/14

SDS

LOR B Resists

Cyclopentanone

Combustible - Irritant

MicroChem

4/19/12

SDS

Microprimer P-20

Hexamethyldisilazane

Combustible - Irritant

Shin Etsu

11/4/13

SDS

MiR 701 Photoresist

Ethyl Lactate

Combustible - Irritant

AZ/Merck8/13/15SDS
nLOF 2020 PhotoresistPGMEA

nLOF 2020 Photoresist

AZ/Merck4/17/15

SDS

OiR 620 Photoresist

PGMEA

Combustible - Irritant

Fuji Film

8/25/14

SDS

Microposit S1805 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

7/22/15

SDS

Microposit S1813 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

7/22/15

SDS

Microposit S1827 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

2/25/15

SDS

MicroChem SU-8 2000 Photoresist

Gamma Butyrolactone

Combustible - Irritant

MicroChem

7/16/13

SDS

MicroChem SU-8 3000 Photoresist

Gamma Butyrolactone

Combustible - Irritant

MicroChem

7/16/13

SDS

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Chemical/Trade Name

Ingredient of Concern

Main Hazard

Manufacturer

Rev

SDS Link

Data Sheet

Acetone

Acetone

Flammable - Irritant

Avantor

6/17/14

SDS


BTS-220PGMEAPropylene Glycol Methyl Ether AcetateFlammable - IrritantJT Baker9/17/14SDS

Chloroform

Chloroform

Combustible / Toxic

JT Baker

6/12/14

SDS


Ethanol

Ethanol

Flammable

Pharmco

5/8/14

SDS


Isopropanol

Isopropanol

Flammable - Irritant

Avantor

6/23/14

SDS


Methanol

Methanol

Flammable - Toxic

Avantor

4/2/15

SDS


Nano Remover PG

N-Methyl Pyrrolidinone

Combustible - Irritant

Microchem

12/16/14

SDS


NMPN-Methyl PyrrolidinoneCombustible - IrritantBDH - VWR3/23/15SDS

PRS2000

N-Methyl Pyrrolidinone

Combustible - Irritant

Avantor

6/8/14

SDS

Data Sheet for PRS 2000
RER 600PGMEAPropylene Glycol Methyl Ether AcetateFlammable - IrritantJT BakerFuji Film62/174/1419SDS

SU8 Thinner

Cyclopentanone

Flammable - Irritant

MicroChem

7/2/13

SDS


XyleneXyleneFlammable - IrritantMillipore10/30/14SDS

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