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Tool

Certification

Use

CVC 601 Sputter

Required

DC sputter of metals / conducting targets

PE2400A RF Sputter

Required

RF Sputter of conducting and insulating targets

PE4400 RF Loadlock Sputter

Required

RF Sputter of conducting and insulating targets, loadlocked

CHA Ebeam Evaporator

Required

Eight pocket electron beam evaporation

CHA Flash Evaporator

Required

Flash evaporation of Al wire

CVC Thermal Evaporator

Required

Thermal evaporation

Nanomaster NSC 2000

Required

Sputter Deposition

Denton Sputter

Required

Sputtering of gold on SEM samples

Anatech Sputter

Required

Sputtering of carbon on SEM samples

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