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SVG 88 Coat/Develop Track #1

  • Set up for 100mm 150mm wafers - gline MiR 701 resist dispense

SVG 88 Coat/Develop Track #2

  • Set up for 150mm wafers - MiR 701 resist dispense

Manual Coat / Develop Tools

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CEE Manual Spin Coating Station

  • Use for manual HDMS prime / coating of positive photoresists

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