Versions Compared

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.

...

[Image:bluem.jpg]

==Facts==

*Image Added

Facts

  • The Blue M Ovens are for baking substrates.

      ...

        • Used for soft & hard bake of photoresists.

      ...

        • Used for post coat baking of spin on dopants and spin on glass.

      ...

      Personnel

      ...

      ...

      • Tool Engineer -

      ...

      ...

      • Process Engineer -

      ...

      ...

      Tool & Process Information

      ...

      ...

      Manuals & Users

      ...