- The SVG 88 #2 is a photoresist coat & develop track.
- Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
- It has a coat track with HMDS vapor prime and softbake hotplate.
- It has a develop track with post develop hardbake hotplate.
- Manual dispense is not allowed on this track.
- Tool Engineer - Zach Kogut
- Process Engineer - Sean O'Brien
- Process Engineer - Patricia Meller
Tool & Process Information
Manuals & Users