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Pricing Information

Information on the hourly rates for SMFL tools and mask prices

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SMFL Services and Capabilities

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  • We have run this process for customers using their design and incorporating our test structure for test verification.
  • Aluminum and Tungsten gate metals have been processed - others are possible.
  • Our Vt's are well matched but implant splits are possible.

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  • We are currently putting together a page with more details including
  • Spice model parameters
  • Test results of last lot run - 4/12
  • Overview of the SMFL test chip with details on specific devices
    ** Typical run time is ~8 weeks

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Details about the SMFL CMOS Process, Performance, Specifications, and Options

If you require this information or a quote on your process, please contact T. Grimsley

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Scanning Electron Microscopy There are several SEMs available for imaging a variety of samples.

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LEO EVO 50 LaB6 system.

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Film Thickness - Ellipsometry

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  • Our ASM LPCVD system is capable of depositing Nitride, Poly and Low Temp Oxide.We also have a Parylene deposition system

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Short Courses

The SMFL has run hands on courses in Cleanroom Etiquette, MEMS Processing, and Thin Films.

We can can custom tailor a course to suit the needs of your organization. Please contact us and we can discuss your requirements.

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A complete listing of all of the Tools in the SMFL can be found here