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Chemical/Trade Name

Ingredient of Concern

Main Hazard

Manufacturer

Rev

SDS Link

HexamethyldisilazaneHexamethyldisilazaneCombustible/Corrosive/ToxicAvantor

6/8/14

SDS

LOR A Resists

Cyclopentanone

Combustible - Irritant

MicroChem

10/7/14

SDS

LOR B Resists

Cyclopentanone

Combustible - Irritant

MicroChem

4/19/12

SDS

MiR 701 Photoresist

Ethyl Lactate

Combustible - Irritant

AZ/Merck8/13/15SDS
nLOF 2020 PhotoresistPGMEA

nLOF 2020 Photoresist

AZ/Merck4/17/15

SDS

Microposit S1805 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

7/22/15

SDS

Microposit S1813 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

7/22/15

SDS

Microposit S1827 Photoresist

PGMEA

Combustible - Irritant

Dow/ Rohm& Haas

2/25/15

SDS

MicroChem SU-8 2000 Photoresist

Gamma Butyrolactone

Combustible - Irritant

MicroChem

7/16/13

SDS

MicroChem SU-8 3000 Photoresist

Gamma Butyrolactone

Combustible - Irritant

MicroChem

7/16/13

SDS

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