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1. PVD Tools - including CVC601, CVC Evaporator, CHA Ebeam, PE2400's, PE4400, CHA Flash Evap

  • The PVD tools should be reserved in 4 hour blocks during the day.
  • Two 4 hour blocks available per day - 9am to 1pm and 1pm to 5pm
  • No more than three 4 hour daily blocks reserved per work week.
  • Overnight off hours block available - Starts at 5pm - out by 9am next morning
  • No more than three overnight blocks reserved per work week.
  • Weekend - no restrictions

2. LPCVD

  • No off hours use without SMFL staff coverage.
  • The LPCVD should be reserved in 4 hour blocks.
    • Two 4 hour blocks available per day - 8am to 12:30pm and 12:30pm to 5pm

3. Ion Implantation

  • No off hours use without SMFL staff approval.

4. Reservations may not be made on research tools without permission of responsible party/PI.

  • KJL PVD 75 Evaporators - Dr. Seth Hubbard
  • KJL PVD Sputter - Dr. Seth Hubbard

Failure to follow these rules will result in your reservation being deleted.