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SMFL

...

SDS Listing - Approved Imported Chemistry

This is a listing of SMFL Approved Chemistry for the various research projects.

...

You can find the SMFL Imported Chemical Form here

Finished

Researcher

Chemical

MSDS inSystem

Manufacturer

Rev

MSDS

SDS Link

Inventory
ASI Semiconductor
 8
Nichrome etchant
AgiltronTDMR-AR5300 TOK
Transene5/1/
14
19
 
SDS
F 2745





Carter
 MSDS
Dextran
AgiltronAZ MIR701 Photoresist AZ    AgiltronAZ 400 K 4:1 Developer AZ            Ewbank

ARC iCon 16

 Brewer4/6/01
MP Biomedicals1/29/15SDS
CarterSU8 3010 PhotoresistMicrochem10/15/14SDS
CarterSylgard 184 SilconeDow Corning2/17/15SDS
CarterSylgard 184 Silcone Curing AgentDow Corning3/19/16SDS
  
Ewbank
 

ARC XLT Photoresist

 
Brewer12/7/14

MSDS

F 2745
 

Ewbank

ARF ARC 1941J

8250 Photoresist

 JSR8/8/02

MSDS

F 2745 

Ewbank

ARF ARX2361J Photoresist

 JSR10/5/04

MSDS

  

Ewbank

ARF AIM6203JN Photoresist

 JSR8/21/09

MSDS

F 2745 

Ewbank

ARF ARX2928JN Photoresist

 JSR9/22/08

MSDS

F 2745 

Ewbank

8250 Photoresist

 JSR1/12/00

MSDS

F 2745 
Arch/Fuji1/12/00

MSDS

Ewbank

APX K1

Brewer1/21/15

SDS

Ewbank

ARC iCon 16

Brewer7/26/18

SDS

Ewbank

ARC iCon 7

Brewer7/26/18

SDS

Ewbank

AZ 9260 Photoresist

 
AZ
Fuji
4/
14
5/
97
15
MSDS 

SDS

 

Ewbank

Butyl Acrylate

 AZ1/19/12

MSDS

F 2745 
Sigma Aldrich3/13/15

SDS

Ewbank

Darocur/Igracure 1173 Photoinitiator

 Sigma6/13/06

MSDS

  
Ciba/BASF7/8/14

SDS

Ewbank

Ethylene Glycol

 
Sigma Aldrich
4
2/
21
26/
12
15
MSDS 

SDS

 

Ewbank

Gamma-Hydroxybutyric acid lactone

 
Sigma Aldrich
5
6/
8
24/
12
14
MSDS 

SDS

F 2745

Ewbank

IRGAcure 651

 
Ciba/BASF4/
27
30/
05
15
MSDS

SDS

  
EwbankIM HM140 Spin on CarbonIrresistable Materials2/24/15SDS

Ewbank

Isobornyl acrylate

 Sigma1/12/12

MSDS

F 2745 

Ewbank

Sigma Aldrich11/27/14

SDS

EwbankPropylene glycol monomethyl ether acetateSigma Aldrich12/11/14SDS
EwbankProTEK B3 25Brewer7/13/15SDS
EwbankProTEK B3 25 PrimerBrewer4/21/15SDS

Ewbank

TSMR-iN008 PM Photoresist

 
TOK
TOL 
1/1/06

MSDS

 

Ewbank

WS 3543

 
Indium
7
10/
21
3/
10
14
MSDS

SDS

 

 

  

 

  

 

  

Fuller

Carbon Standard Organic

 
Ricca5/1/
13/05
15
MSDS

SDS

F 2745  

Fuller

M Bond 610 Curing

 Vishay4/13/10

MSDS

F 2745 

Fuller

PI-2556 Polyimide

 HD Micro10/1/09

MSDS

F 2745    

Fuller

M Bond 610 Adhesive

 Vishay4/13/10

MSDS

F 2745 

Hirschman

nLOF 2020 Photoresist

 AZ11/5/11

MSDS

F 2745 

Hirschman

Trimethylaluminum

 Strem4/25/14MSDS  

Hirschman

Diethylzinc

 Strem4/25/14MSDS          

PI-2556 Polyimide

HD Micro5/7/15

SDS

     
GaborskiSU8 DeveloperMicrochem10/28/11SDS 
GaborskiSU8 3010 PhotoresistMicrochem10/15/14SDS
GaborskiBARLI-II 90AZ4/5/15SDS
GaborskiAQUATAR COATINGAZ7/8/15SDS
     

Hirschman

512B - Spin on Glass

Honeywell8/25/15SDS

Hirschman

Accuglass P112 SOG

 Honeywell5/31/01

MSDS

F 2745
Honeywell11/19/14

SDS

HirschmanAdhesion Promoter AP3000Dow5/4/15SDS

Hirschman

B150X - Boron Spin on Dopant

Honeywell1/5/15SDS

Hirschman

B75X - Boron Spin on Dopant

Honeywell1/5/15SDS
HirschmanBDC1 - Boron Dopant CoatingFuturrex1/31/18SDS

Hirschman

Cyclotene 3022

Dow Chemical5/4/15SDS

Hirschman

Developer RD6

Futurrex1/21/19

SDS

HirschmanINTERVIA PHOTODIELECTRIC 8023-10Rohm & Haas8/29/19SDS
Hirschmanmr-DWL 40 PhotoresistMicroresist Technology2/12/16SDS
HirschmanNR9g-1500PY PhotoresistFuturrex1/13/16SDS
HirschmanPDC5 - Phosphorous Dopant CoatingFuturrex1/31/18SDS

Hirschman

P5S - Spin on Glass

Honeywell10/24/14SDS
Hirschman

Remover RR5

Futurrex1/29/14

SDS

HirschmanSUEX TDFS Dry ResistDJ Devcorp9/30/15SDS





HubbardAmmonium SulfideAlfa Aesar10/9/12SDS
HubbardAZ 300 MIF DeveloperClariant9/19/12SDS
HubbardAZ 5214 PhotoresistClariant4/17/15SDS

Hubbard

KMPR 1005 Photoresist

t

 
Microchem
8
4/
26
19/
06
12
MSDS 

SDS

F 2745

Hubbard

KMPR 1010 Photoresist

 
Microchem
8
4/
26
19/
06
12
MSDS

SDS

F 2745MSDS
HubbardLOR 10AMicrochem10/7/14SDS 
Hubbard

XP Neutralizer K

 Microchem4/16/08

MSDS

  

Hubbard

XP Removers K - Part A

 Microchem4/16/08
Microposit S1813 PhotoresistDow / Rohm& Haas7/22/15SDS
HubbardPotassium Sodium Tartrate TetrahydrateSigma Aldrich1/20/15SDS
HubbardSylgard 184 SilconeDow Corning2/17/15SDS
HubbardSylgard 184 Silcone Curing AgentDow Corning3/19/16SDS
  

Hubbard

XP Removers K - Part B
   
Microchem
HubbardArsineMatheson12/
18
4/
08
14
MSDS
SDS
  
Hubbard
 

Hubbard

Spin on Dopant - Silica Film

 Emulsitone7/1/09

MSDS

  

Hubbard

Spin on Dopant - Arsenosilicafilm 8869

 Emulsitone7/1/09

MSDS

  

Hubbard

Spin on Dopant - Zincsilicafilm 306

 Emulsitone7/1/09

MSDS

  

Hubbard

Spin on Dopant - Tinsilicafilm

 Emulsitone7/1/09

MSDS

  

 

 

   

 

  

INT

WL 5351 Spin on Silicone

 DOW11/16/09

MSDS

F 2745   AZ 1512
DisilaneMatheson3/14/14SDS
HubbardForming Gas (5% H2 in N2)Matheson10/26/15SDS
HubbardHydrogenMatheson3/14/14SDS
HubbardPhosphineMatheson12/10/12SDS
HubbardTrimethylgallium (TMGa)Dow/SAFC Hitec4/20/15SDS  
HubbardTriethylgallium (TEGa)Dow/SAFC Hitec8/1/14SDS  
HubbardTrimethylindium (TMIn)Dow/SAFC Hitec12/11/15SDS  
HubbardTrimethylaluminum (TMAl)Dow/SAFC Hitec3/16/15SDS 
Hubbard

Tritertiarybutylaluminum (TTBAl) 

Dow/SAFC Hitec5/26/16SDS
HubbardTriethylantimonyDockweiler Chemicals1/20/16SDS
HubbardTrimethylantimonyDow/SAFC Hitec4/21/14SDS   
HubbardTertiarybutylarsineDockweiler Chemicals6/5/15SDS
HubbardCarbontetrachlorideDow/SAFC Hitec4/9/15SDS
HubbardDiethyltellurideDow/SAFC Hitec8/14/14SDS
     

Kurinec

KoppulaSU8-3025 Photoresist
x
MicroChem
AZ
10/
16
15/
13
14SDS
     

Kurinec

Accuglass T-11 SOG

Honeywell4/23/14

SDS

Kurinec

AZ 1518 Photoresist

x
AZ10/
3
16/
12 
13

SDS

F 27454/3

Kurinec

Trichloro(octadecyl)silane

 Sigma

Toluene

Sigma Aldrich2/25/14

SDS

F 2745
  
Kurinec
 
Toluene
  
Sigma2/25

Landi

495 PMMA Resist

Microchem10/10/14

SDS

Landi

Microposit S1813 Photoresist

Dow / Rohm&Haas7/22/15SDS
  
Kurinec
 
Allytrichlorosilane
  
Sigma4/3 
Lapizco-EncinasSU8 2-25 PhotoresistMicroChem10/15/14SDS
F 2745         

Landi

495 PMMA Resist

xMicroChem2/20/02

MSDS

  

 

 

Sigma
Lapizco-EncinasSU8 3050 PhotoresistMicroChem10/15/14SDS
Lapizco-EncinasSU8 DeveloperMicroChem10/28/11SDS
Lapizco-EncinasSylgard 184 SilconeDow Corning2/17/15SDS
Lapizco-EncinasSylgard 184 Silcone Curing AgentDow Corning3/19/16SDS
     
Lu

Bismuth (III) Teluride

 

Teflon AF

DuPont5/27/15

SDS

Lu

Ethanol

Sigma Aldrich7/
30
9/
14
15

SDS

 

Lu

  

SU8 2050 Photoresist

 

 

MicroChem10/15/14SDS
     

MicroE

APX-K1 Adhesion Promoter

 
Brewer
9
1/
13
21/
02
15
MSDS 

SDS

  
MicroEBorofilm B100 Spin on Dopant
 Filmtronics  F 2745
Emulsitone5/1/15SDS
MicroEB150 Boron Spin on Dopant
  MicroEN250
Filmtronics
  F 2745
10/1/15SDS

MicroE

P509 Phosphorous Spin on Dopant

 
Filmtronics
 
10/1/15

SDS 

F 2745 
MicroE
P509
P8545SF Phosphorous Spin on Dopant
 
Filmtronics3/26/18SDS
MicroEPhosphorofilmEmulsitone5/1/15
/06

MSDS

F 2745 

MicroE

ProTEK B3 25

 Brewer8/2/07

MSDS

  
SDS
MicroEmr-DWL 5 PhotoresistMicroresist Technology2/12/16SDS
MicroEma-N 1400 Negative Tone PhotoresistMicroresist Technology6/11/15SDS
MicroEma-N 2400 Negative Tone PhotoresistMicroresist Technology6/11/15SDS 

MicroE

PMGI SF 13

MicroChem3/26/15

SDS

MicroEProTEK B3 21Brewer7/13/15SDS 

MicroE

ProTEK B3 25

Brewer7/13/15

SDS

MicroE

ProTEK B3 Primer

 
Brewer
8
4/
28
21/
07
15
MSDSPMGI SF Series Resists

SDS

  

MicroE

nBn Technologies

Edge Bead Remover EBR2

 Futurrex 

MSDS

   
MicroChem2/21/02

MSDS

  

MicroE

Protek PS Primer (EXP 06050)

 Brewer6/21/07

MSDS

  

MicroE

ProTEK PS (BSI.P06090)

 Brewer6/21/07

MSDS

  

MicroE

Protek Remover 100

 Brewer5/19/05

MSDS

         xNanoArkMicroposit S1805 PhotoresistxMicroChem4/8/11MSDS  

 

 

   

 

  

nBn Technologies

NR7-10000PY Photoresist

 Futurrex 

MSDS

  

nBn Technologies

NR9-10000PY Photoresist

 Futurrex 

MSDS

  

nBn Technologies

Developer RD6

 Futurrex 

MSDS

  

nBn Technologies

Remover RR41

 Futurrex 

MSDS

  
MosheniELASTOSIL RT 601 AWacker9/14/18SDS
MosheniELASTOSIL RT 601 BWacker9/14/18SDS





nBn TechnologiesAZ-P4110 PhotoresistAZ4/3/15SDS
nBn TechnologiesCitric AcidAlfa Aesar9/3/13SDS

nBn Technologies

Developer RD6

Futurrex1/21/19

SDS

nBn Technologies

Edge Bead Remover EBR2

Futurrex4/30/15

SDS

nBn TechnologiesIC1-200 - Dielectric CoatingFuturrex1/31/18SDS
nBn TechnologiesNR1-6000PY PhotoresistFuturrex4/30/15SDS

nBn Technologies

NR7-1000PY Photoresist

Futurrex4/30/15

SDS

nBn Technologies

NR74G-1000P Photoresist

Futurrex1/21/16

SDS

nBn TechnologiesNR9g-1000PY PhotoresistFuturrex5/1/15SDS
nBn TechnologiesNR9g-1500PY PhotoresistFuturrex1/10/19SDS

nBn Technologies

NR9-8000 Photoresist

Futurrex5/1/15SDS
nBn TechnologiesPR1-1000A1 PhotoresistFuturrex1/21/19SDS

nBn Technologies

Remover RR41

Futurrex1/21/19

SDS

nBn Technologies

Remover RR5

Futurrex1/29/14

SDS

nBn TechnologiesSpin on Glass - ZnDesert Silicon3/28/18SDS
nBn TechnologiesSodium HypochloriteScience Company4/15/15SDS

nBn Technologies

Photopolymerization Accel - AN-910-E

Spectra Group Limited,2/23/15

SDS

nBn Technologies

Visible/UV light Photoinitiator - H-Nu 470

Spectra Group Limited,2/18/15

SDS

nBn Technologies

Photoacid generator - H-Nu 254

Spectra Group Limited,11/21/17

SDS

nBn TechnologiesZinc Phosphorus Dopant ZPDC2-2000Futurrex1/23/18SDS





NinkovAcetic Acid GlacialSigma Aldrich6/27/14SDS
     
OllesAmmonium FluorideAnachemica2/27/16SDS
OllesTEOSAcros5/21/14SDS
OllesBismuth(III) nitrate pentahydrateBeantown Chemical11/24/14SDS
     

Orthogonal

Orthogonal Developer 100

  
Orthogonal 

MSDS

 

Orthogonal

Orthogonal Developer 103

  
Orthogonal 

MSDS

 

Orthogonal

Orthogonal Developer 110

  
Orthogonal 

MSDS

 

Orthogonal

Orthogonal Stripper 310

  
Orthogonal 

MSDS

 

Orthogonal

Orthogonal Stripper 610

  
Orthogonal 

MSDS

 

Orthogonal

Orthogonal Stripper 700

  
Orthogonal 

MSDS

 

Orthogonal

Orthogonal Stripper 900

  
Orthogonal 

MSDS

 

Orthogonal

OSCoR 1510 Photoresist

  
Orthogonal 

MSDS

 

Orthogonal

OSCoR 2312 Photoresist

  
Orthogonal 

MSDS

 

Orthogonal

OSCoR 4000 Photoresist

  
Orthogonal 

MSDS

 

Orthogonal

OSCoR CP Photoresist

  
Orthogonal 

MSDS

 

Orthogonal

Orthogonal Solution 900

 
Orthogonal 

MSDS

  

Orthogonal

AZ 100 Remover

x
AZ
 

MSDS

  
4/13/15

SDS

Orthogonal

AZ 300 MIF Developer

x 
AZ
 

MSDS

 
9/19/12

SDS

Orthogonal

AZ 1512 Photoresist

x
AZ
 
10/16/13

SDS

  

Orthogonal

AZ nLOF 2020 Photoresist

xMSDS
AZ
  
4/17/15

SDS

 

 

  

 

  

 

  

Preble

Cyclotene 3022

   

MSDS

  

Preble

Espacer 300Z

   

MSDS

  

Preble

FOX(R)-12 Flowable Oxide

   

MSDS

F 2745 
PCB PiezotronicsTi Tungsten EtchTransene4/1/16SDS





Preble

495 PMMA Resist

x  

MSDS

 
Microchem10/10/14

SDS

Preble

Espacer 300Z

Showa Denko3/1/09

MSDS

Preble

Fox Flowable Oxide

Dow Corning8/21/15SDS

Preble

ma-N

1400  

1405 Photoresist

   

MSDS

 
Micro Resist6/11/15SDS

Preble

ma-N

2400  

Preble

Mesitylene

   

MSDS

  

Preble

MIBK:IPA Developer

   

MSDS

  

2401 Photoresist

   

MSDS

 
Micro Resist6/11/15SDS

Preble

MIBK:IPA Developer 1:3

Microchem9/8/2011

SDS

PrebleSU8-2002 PhotoresistMicrochem10/15/14SDS
PrebleSU8 DeveloperMicrochem10/28/11SDS 

Preble

SurPass 3000

   

MSDS

  
DisChem4/15/14

SDS

Preble

XR-1541-004 E-Beam Resist

   

MSDS

Dow Corning8/19/15

SDS

 

 

  

 

  

 

  

Raisanen

Teflon AF

x  
DuPont5/27/15

SDS

 

 

  
 

Rommel

 

950 PMMA Resist

  

Rommel

950 PMMA Resist

x  

MSDS

  

Rommel

Ammonium Sulfide

x  

MSDS

  

Rommel

AP 3000 Adhesion Promoter

   

MSDS

   

Rommel

Mesitylene

Microchem10/10/14

SDS

Rommel

Adhesion Promoter AP 3000

Dow2/22/11

SDS

RommelCitric AcidAlfa Aesar9/3/13SDS 
RommelCyclotene 3022Dow5/4/15SDS
Rommel

Hexid Heat Transfer Fluid

Edwards1/1/13

SDS

Rommel

LOR 5A Photoresist

MicroChem10/17/14SDS

Rommel

Mesitylene

Alfa Aesar1/23/15

SDS

Rommel

XR-1541-004 E-Beam Resist

   

MSDS

F 2745
Dow4/27/15

SDS

    

MSDS

 
 
 

Rommel

Hexid Heat Transfer Fluid

 
SahinSU8 2000 Thinner - CyclopentoneMicroChem7/2/13SDS

 

MSDS

 

  

 

 
Schertzer
  

Fluorinert FC40

 

 

  

Sahin

Sylgard 184 Silicone Curing

   

MSDS

  

Sahin

Sylgard 184 Silicone Elastomer

   

MSDS

  

 

 

   

 

  Schertzer

Polymer Microspheres

    MSDS  SchertzerTeflon AFx  
Sigma Aldrich11/12/14SDS
Schertzer

Nafion D521

Alfa Aesar3/18/13SDS
SchertzerPFC1600VCytonix5/16/17SDS
SchertzerPFC160Cytonix5/23/16SDS
Schertzer

Polymer Microspheres

Bangs5/19/15SDS
Schertzer

SU8-2001 Photoresist

Microchem10/15/14SDS
Schertzer

SU8 3005 Photoresist

Microchem10/15/14SDS
SchertzerTeflon AFDupont5/27/15SDS
  
Schertzer

Fluorinert FC40

x
   
MSDS Schertzer

Microchem SU-8 3000 Series

x   MSDS  Schertzer

Nafion D521

x   SDS  Schertzer

Perfluorosulfonic Acid

x   SDS     
  Schertzer

Microchem SU-8 2000 Series

x   MSDS  

 

 

   

 

  

Smith

AZ SPC-124A Rinse

   

MSDS

  

 

 

   

 

  

Spectrum

Neutronex 309 Make Up

SimPore

Boron Doped B Series SOG

Desert Silicon4/6/16SDS

SimPore

ProTEK B3 25

Brewer7/13/15SDS
SimPoreProTEK B3 PrimerBrewer4/21/15SDS

SimPore

PSE-200

Transene4/1/16

SDS

SimPore

PSE-300S/F

Transene7/1/13

SDS

SimPore

Microposit S1813 Photoresist

Dow10/28/11SDS
SimPoreSU8 DeveloperMicrochem10/28/11SDS
     

SimPore

PSE-300S/F

x  

MSDS

 
TritonAZ MIR701 PhotoresistAZ9/4/15SDS
TritonAZ P4400 PhotoresistAZ12/31/14 
TritonAZ 400 K 4:1 DeveloperAZ9/5/14SDS
TritonLOR 7BMicrochem4/19/12SDS
TritonMF 321 DeveloperDow / Rohm & Haas4/26/15SDS
TritonTDMR-AR5300TOK8/1/14SDS
     
MSDS
UCSD
 
AZ P4620 Photoresist
 

Spectrum

Technic Elevate Gold 7990
AZ8/13/15SDS
   

MSDS

  
 
Wan
  
SU8 2015 Photoresist
  
Microchem10/15/14SDS
   

Swartzlander

CP1 Resin

  
 
Xerox
MSDS
CT-2000
 
Fuji  
 
Xerox
 
SB-4000
 
Fuji  
 
Xerox
 
SG-4000
UCSD
Fuji
AZ 4260 Photoresist
  
 
Xerox
 
SR-4000
 
Fuji  
     
 
Zhang
 

Walters

Kynar/PVDY

   

MSDS

  

Walters

Dimethylacetamide

   

MSDS

 
Silver NitrateCascade Silver Company1/1/15SDS
Zhang

Sodum Dodecyl Sulfate

Affymetrix4/21/15SDS
Zhang

Styrene

TCI America8/18/15SDS