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Tube 6 is used for the wet oxidation of silicon dioxide.

  • Uses hydrogen gas and oxygen to produce a steam for the faster growth of silicon dioxide.
  • Wafers are loaded into quartz boats - current sizes include 75mm, 100mm & 150mm.
  • Maximum oxide growth is kept to <2um.
  • Clean wafers only - no previous metal processing

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Personnel

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Manuals & Users