- Model P2
- Pieces to 8 inch wafers.
- Total step height 100 Å to 300µm with various resolutions (1A at 10um scale)
- Scan length up to 200 mm.
- Stylus radius is 12 microns
- Tool Engineer - John Nash
- Process Engineer - Sean O'Brien
Tool & Process Information
- Process Engineer - Patricia Meller
Manuals & Users
News & Updates
11/20/13 - Going out for repair and calibration the week of Dec 9th. I expect it back the week of Jan 6th.
10/31/13 - The Tencor is slated to go out over the intersession break for a refit and service. Exact dates will follow.