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  • Model P2
  • Pieces to 8 inch wafers.
  • Total step height 100 Å to 300µm with various resolutions (1A at 10um scale)
  • Scan length up to 200 mm.
  • Stylus radius is 12 microns

Personnel

Tool & Process Information

Manuals & Users

News & Updates

11/20/13 - Going out for repair and calibration the week of Dec 9th. I expect it back the week of Jan 6th.

10/31/13 - The Tencor is slated to go out over the intersession break for a refit and service.  Exact dates will follow.