Title: Tool Set  
Author: Thomas Grimsley Jun 14, 2012
Last Changed by: Thomas Grimsley Oct 23, 2018
Tiny Link: (useful for email) https://wiki.rit.edu/x/24PSAw
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Incoming Links
SMFL (3)
    Page: Frequently Asked Questions
    Home page: Home
    Page: Services Offered
Hierarchy
Parent Page
    Home page: Home
Children (8)
    Page: Chemical Vapor Deposition
    Page: CMP & Dicing
    Page: Dry Etch
    Page: Lithography
    Page: Metrology
    Page: Physical Vapor Deposition
    Page: Thermal & Implant
    Page: Wet Chemical Process
Labels
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Outgoing Links
External Links (2)
    www.smfl.rit.edu/pdf/safety/SMFL_Users_Manual.pdf#page=27
    https://goo.gl/tId6vL
SMFL (75)     Page: AG 610A RTP
    Page: Thermal & Implant
    Page: Varian 350D Implanter
    Page: Wet Bench - Ultrasonic
    Page: Tool Reservation
    Page: Rudolph IV Ellipsometer
    Page: Blue M Ovens
    Page: Suss MA55 Aligner
    Page: Wet Chemical Process
    Page: CHA Ebeam Evaporator
    Page: Materials in the SMFL
    Page: CVC 601 Sputter
    Page: Tempress Dicing Saw
    Page: GCA Stepper
    Page: CMP & Dicing
    Page: ASML Stepper
    Page: Bruce 1 - Tube 2
    Page: Chemical Vapor Deposition
    Page: Bruce 1 - Tube 1
    Page: Bruce 1 - Tube 4
    Page: Wet Bench - RCA General Clean
    Page: Wet Bench - Manual Process 2
    Page: Bruce 1 - Tube 3
    Page: Wet Bench - Manual Process 3
    Page: Prometrix SM300 SpectraMap
    Page: Wet Bench - Manual Process 1
    Page: CEE Resist Developer
    Page: Wet Bench - Manual Process 4
    Page: Leitz Inspection Station
    Page: Anatech Sputter
    Page: Olympus Microscope
    Page: NanoSpec Spectrophotometer
    Page: Heidelberg DWL 66 Laser Writer
    Page: Ecomet Grinder
    Page: Dry Etch
    Page: Trion Etcher
    Page: AME P5000 Chamber A
    Page: Wyko Dynamic Optical Profiler
    Page: Lithography
    Page: AME P5000 Chamber C
    Page: Bruce 2 - Tube 8
    Page: Xactic Etcher
    Page: AME P5000 Chamber B
    Page: Metrology
    Page: Strausbaugh CMP
    Page: Physical Vapor Deposition
    Page: LAM 490
    Page: GaSonics Asher
    Page: Bruce 2 - Tube 6
    Page: CDE Res Map
    Page: Bruce 2 - Tube 7
    Page: CEE Resist Spinner
    Page: Bruce 2 - Tube 5
    Page: KS780 Dicing Saw
    Page: CVC Thermal Evaporator
    Page: Denton Sputter
    Page: Amray 1830 SEM
    Page: Wet Bench - Nitride and Silicon Etch
    Page: Heraeus Oven
    Page: Wet Bench - RCA MOS Clean
    Page: Woollam VASE
    Page: Tool Set
    Page: Suss MA150 Aligner
    Page: SMFL Parylene
    Page: Wet Bench - BOE and Pad Etch
    Page: STS ASE Deep Silicon Etch
    Page: Wet Bench - Al Etch and Solvent Strip
    Page: ASM LPCVD Tube 2
    Page: CHA Flash Evaporator
    Page: PE4400 Sputter
    Page: Tencor P2
    Page: SCS Spin Coater
    Page: ASM LPCVD Tube 1
    Page: LAM 4600 Al Etcher
    Page: Leica Inspection Station