• The SVG 88 #2 is a photoresist coat & develop track.
    • Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines.
    • It has a post exposure bake hotplate
    • It has a coat track with HMDS vapor prime and softbake hotplate.
    • Spin chuck has Edge Bead Removal - currently set to dispense RER-600
    • It has a develop track with post develop hardbake hotplate.
    • Manual dispense is not allowed on this track.
  • Chemistry
    • The coat track is set to dispense MIR 701 positive photoresist.
    • The develop track dispenses CD 26 TMAH developer.


Tool & Process Information

Manuals & Users

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