- The SVG 88 #1 is a photoresist coat & develop track.
- Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
- It has a coat track with HMDS vapor prime and softbake hotplate.
- It has a develop track with post develop hardbake hotplate.
- Manual dispense is allowed on this track.
- The coat track is set to dispense MIR 701 positive photoresist.
- The develop track dispenses CD 26 TMAH developer.
Manuals & Users