• The SVG 88 #1 is a photoresist coat & develop track.
    • Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
    • It has a coat track with HMDS vapor prime and softbake hotplate.
    • It has a develop track with post develop hardbake hotplate.
    • Manual dispense is allowed on this track.
  • Chemistry
    • The coat track is set to dispense MIR 701 positive photoresist.
    • The develop track dispenses CD 26 TMAH developer.


Tool & Process Information

Manuals & Users

  • No labels