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Facts
- The SVG 88 #1 is a photoresist coat & develop track.
- Set up for 150mm round substrates - cassette to cassette handling for coat and develop lines
- It has a coat track with HMDS vapor prime and softbake hotplate.
- It has a develop track with post develop hardbake hotplate.
- Manual dispense is allowed on this track.
- Chemistry
- The coat track is set to dispense MIR 701 positive photoresist.
- The develop track dispenses CD 26 TMAH developer.
Personnel
- Tool Engineer - Bruce Tolleson
- Process Engineer - Sean O'Brien
- Super User - Patricia Meller
- Super User - Venkatesh Deenadaylan
- Any of these personnel can certify new users
Tool & Process Information
Manuals & Users
Overview
Content Tools
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