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Need to get in the reservation system?


Rules for Tool Reservation

1. Reservations are good for 15 minutes beyond your start time, after that the tool is open for walk-up use.

  • Labs are the only exception to this.
  • Check with the lab instructor to see if the tool is available.

2. Classes have priority for tool reservations except for research tools.

  • Your reservation may be bumped for a class.
  • You will be notified beforehand if a class will conflict with your reservation.

3. Equipment in use tags must still be used by all users in addition to your reservation.

4. Tools can not be reserved more than one week in advance without clearance. Labs are exempted from this

5. Reserving tools off hours is restricted to those users that possess off hours access only.

6. Some tools have specific restrictions on reservations

7. Please delete your tool reservation if you are not able to use the tool

Reservation Links by Area

PVD Reservations

Lithography Tool Reservations

Metrology Tool Reservations

Dry Etch Tool Reservations

Thermal & Implant Tool Reservations

Wet Etch Tool Reservations

CVD Tool Reservations

Need to get in the reservation system?



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