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The Prometrix SpectraMap is a spectrophotometer. The basic operating principle is that the intensity of monochromatic reflected light depends strongly on film thickness because of interference.

  • Model SM300
  • The film thicknesses are comparable to the wavelength of the incident light.
  • The machine uses a computer-controlled grating monochromator and a photomultiplier tube detector to measure the reflected optical spectrum over the 350 to 800 nm wavelength band) from a bare silicon reference wafer and from the wafer under test.
  • Given an index of refraction for a thin film and the two measured spectrums, the computer will analyze the interference pattern to determine film thickness.


Tool & Process Information

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