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[Image:bluem.jpg]

==Facts==

*The Blue M Ovens are for baking substrates.
**Used for soft & hard bake of photoresists.
**Used for post coat baking of spin on dopants and spin on glass.

==Personnel==

*Tool Engineer - http://www.smfl.rit.edu/staff.php Dave Yackoff
*Process Engineer - http://www.smfl.rit.edu/staff.php Sean O'Brien

==Tool & Process Information==

==Manuals & Users==

*http://www.smfl.rit.edu/pdf/manual/Manual_BlueM_Oven.pdf BlueM Oven Manual

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