==Bruce Tube 6==
*Tube 6 is used for the wet ''[Definitions#Oxidation ]'' of silicon dioxide.
**Uses hydrogen gas and oxygen to produce a steam for the faster growth of silicon dioxide.
**Wafers are loaded into quartz ''[Definitions#Cassettes and Boats ]'' - current sizes include 75mm, 100mm & 150mm.
**Maximum oxide growth is kept to <2um.
**Clean wafers only - no previous metal processing
*Tool Engineer - http://www.smfl.rit.edu/staff.php Dave Yackoff
*Process Engineer - http://www.smfl.rit.edu/staff.php Sean O'Brien
==Tool & Process Information==
==Manuals & Users==