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[Image:bruce2.jpg]

==Bruce Tube 6==

===Facts===

*Tube 6 is used for the wet ''[Definitions#Oxidation ]'' of silicon dioxide.
**Uses hydrogen gas and oxygen to produce a steam for the faster growth of silicon dioxide.
**Wafers are loaded into quartz ''[Definitions#Cassettes and Boats ]'' - current sizes include 75mm, 100mm & 150mm.
**Maximum oxide growth is kept to <2um.
**Clean wafers only - no previous metal processing

==Other Tubes==

*[Bruce 1 - Tube 1]
*[Bruce 1 - Tube 2]
*[Bruce 1 - Tube 3]
*[Bruce 1 - Tube 4]
*[Bruce 2 - Tube 5]
*[Bruce 2 - Tube 6]
*[Bruce 2 - Tube 7]
*[Bruce 2 - Tube 8]

==Personnel==

*Tool Engineer - http://www.smfl.rit.edu/staff.php Dave Yackoff
*Process Engineer - http://www.smfl.rit.edu/staff.php Sean O'Brien

==Tool & Process Information==

*http://www.smfl.rit.edu/tool_status.php Bruce Status

*http://www.smfl.rit.edu/pdf/process/BRUCE_RECIPE_FORM.pdf Bruce Furnace Recipe Request Sheet

    • If a new recipe is needed for the Bruce Furnace, fill out this sheet and return to Dave Yackoff

==Manuals & Users==

*http://www.smfl.rit.edu/pdf/manual/Manual_Bruce_Furnace.pdf Bruce Furnace Manual

*http://www.smfl.rit.edu/pdf/checklist/Certification_Checklist_Bruce_Furnace.pdf Bruce Furnace Certification Checklist

*http://www.smfl.rit.edu/certified_users.php?tool=Bruce_2_-_Tube_6 Certified Users for the Bruce Tube 6

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